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High Vacuum Gauge - CDG100D

Classification:
Product name:
High Vacuum Gauge - CDG100D

Order number:
See ordering information in Data Sheet

Shortdescription:
Capacitance Diaphragm Gauge

Product types:
Pressure

Technology & Profiles:
PROFIBUS, PROFINET

Company:
INFICON AG

Alte Landstr. 6
9496 Balzers
Liechtenstein

Dipl. Ing. Rolf Enderes
Tel +423 388 3111
https://www.inficon.com
reach.liechtenstein(at)inficon(dot)com

Illustration:
Product description:

INFICON SKY CDG100D manometers are your best choice for accurate total pressure measurement and control. CDG100D gauges are temperature controlled at 100 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 100 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

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