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High Vacuum Gauge - CDG160D

Classification:
Product name:
High Vacuum Gauge - CDG160D

Order number:
See ordering information in Data Sheet

Shortdescription:
Capacitance Diaphragm Gauge

Product types:
Pressure

Technology & Profiles:
PROFIBUS

Company:
INFICON AG

Alte Landstr. 6
9496 Balzers
Liechtenstein

Dipl. Ing. Rolf Enderes
Tel +423 388 3111
https://www.inficon.com
reach.liechtenstein(at)inficon(dot)com

Illustration:
Product description:

INFICON SKY CDG160D high temperature manometers are your best choice for accurate total pressure measurement and control. CDG160D gauges are temperature controlled at 160 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.

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